Single Wafer Wet Processing and Cleaning to 300 mm

The Trilennium™ 3303 family of single wafer wet processors comprises complete solutions for cleaning, coating, developing, wet etching, and solvent processing of wafers to 300 mm and reticles to 9" square. These FOUP-compatible, single-wafer systems offer processing on demand, whether for one wafer or a full batch, minimizing chemistry use and disposal requirements. Superior reliability is demonstrated by a test in which the robotics system executed over 250,000 cycles without an assist or interrupt. The 3303 family utilizes single wafer wet processing technology for the best uniformity and cleanliness with the lowest costs. All Systems are SEMI® S2-0200 compliant and CE Marked.

Solid State Equipment Corporation manufactures a full line of single wafer cleaners/processors and hermetic package sealers at its headquarters in suburban Philadelphia. These systems are complemented with application-specific components and supporting systems, including chemistry management systems and environmental systems for sealers. SSEC maintains sales and service offices worldwide, and customer support and process development centers in Horsham, Pennsylvania, Fremont, California, Regensburg, Germany, and Tokyo, Japan. For further information, contact Terri Kolodziejski at SSEC, 215-328-0700, FAX 215-328-9410, tkolodziejski@ssecusa.com.

Solid State Equipment Corporation, 185 Gibraltar Road, Horsham, PA 19044. Tel: 215-328-0700; Fax: 215-328-9410.