PYRAFLAT Rectangular Flanges
Source: Thermionics Vacuum Products
The PYRAFLAT flange is an all-metal seal used in a variety of semiconductor applications including cassette seals, wafer entry ports
The PYRAFLAT flange is an all-metal seal used in a variety of semiconductor applications including cassette seals, wafer entry ports, slot valves and gate valve bonnets. The PYRAFLAT is the best performing rectangular seal in the industry. The PYRAFLAT's flat copper gasket makes installation and re-sealing quick and reliable. The complete flange assembly may be repeatedly temperature-cycled between -196 º C and +500 º C under ultra high vacuum conditions without leaking, as measured by a helium mass spectrometer to <2 x 10-10 std. cc/sec. It comes in rectangular and square dimensions.
Thermionics Vacuum Products, 231-B Otto Street, Port Townsend, WA 98368. Tel: 800-962-2310; Fax: 360-385-6617.
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