Entegris' New Spectra™ FOUP Produces Higher Yields

The Spectra™ FOUP is the new high performance FOUP from materials integrity management leader Entegris. It is fully compatible with all process tools and automation equipment to achieve the highest tool uptime available. The Spectra FOUP promises higher yields due to a proven design to protect wafers from particles, airborne molecular contamination, shock and vibration better than any other FOUP in the market. Entegris On-Site Services experts maintain the Spectra™ FOUP at the customer site. The Spectra™ FOUP features an advanced ESD path to ground and supports many types of identification strategies.

More information about Entegris and the technology, product and service solutions it brings to customers can be found at: www.entegris.com.