Electric Track Vehicle (ETV) System

The Electric Track Vehicle (ETV) System utilizes independently driven vehicles traveling on a monorail track to transport payloads both vertical and horizontal between clean rooms.

Systems can be designed as simple as a single vehicle operating on a single track or can utilize multiple vehicles delivering to multiple stations simultaneously on a loop type network of track.

A variety of standard and customer containers provide gentle handling for specialized loads (including wafer boxes, SMIF pods, FOUPS, totes, tools etc.) To further enhance efficiency, ETV systems with auto load/unload capabilities can interface with other buffer conveyors, WIP Stockers, and host computer controls.

Typical applications include transporting;

Fab to Fab

Fab to CMP

Fab to probe & test

Building to building

Between processes on different floors

Between processes over dirty hallways

Raw Wafers from Receiving/Storage to Fab Areas

Wafer Boxes between Remote Processes (CMP, Sort, Test)

Reticles from Reticle Storage to Fab Areas

Parts from Central Stores to Fab Areas

Wafers and Tooling to Central Cleaning Areas

From Single Point-to-Point systems all the way up to multi-station multi-vehicle systems, we can design a layout to meet the specific needs of your application. Standard track components allow integration into existing and new facilities including penetration through firewalls with UL listed fire doors.

Swisslog Translogic, 10825 East 47th Avenue, Denver, CO 80239. Tel: 800-525-1841; Fax: 303-373-7932.