AeroLoader
Source: PRI Automation Inc.
The PRI AeroLoader is an overhead hoist transport (OHT) system that delivers wafer carriers to "open" loadports on process equipment or other automation subsystems
PRI Automation Inc.oLoader is an overhead hoist transport (OHT) system that delivers wafer carriers to "open" loadports on process equipment or other automation subsystems. Overhead hoists are the preferred solution for intrabay transport for 300mm fabs.
The AeroLoader is an extension of PRI's AeroTrak Product set, utilizing the same flexible track concept and intelligent routing capabilities. Since it is an overhead delivery system, the AeroLoader monorail is a "Zero Footprint" form of intrabay automation. The AeroLoader is highly scalable and can meet the needs of a wide range of intrabay applications.
The AeroLoader loads any SEMI E15.1 compliant process tool loadport equipped with a SEMI E84 communication interface. The MLRV integrates into the fab-wide TransNet material control software system, providing complete loadport-to-loadport material handling.
<%=company%>, 805 Middlesex Turnpike, Billerica, MA 01821-3986. Tel: 978-670-4270; Fax: 978-663-5785
This website uses cookies to ensure you get the best experience on our website. Learn more